Revistes Catalanes amb Accés Obert (RACO)

Ultrafine particles produced by plasma enhanced chemical vapor deposition -from SiH4, CH4, NH3 and B2H6 gas mixtures- for nanostructured ceramics aplications

Esther Pascual Miralles, Adolf Canillas Biosca, Enric Bertran Serra, J. Costa, G. Viera

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